Heterogeneous Integration of Metal Oxides—Towards a CMOS Based Multi Gas Sensor Device por Anton Köck, Marco Deluca, Florentyna Sosada-Ludwikowska, Günther Maier, Robert Wimmer Teubenbacher, Martin Sagmeister, Karl Rohracher, Ewald Wachmann, Jan Steffen Niehaus, Sören Becker, Öznur Tokmak, Hendrik Schlicke, Alexander Blümel, Karl Popovic, Martin Tscherner

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