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Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO<sub>2</sub> ALD Properties for Improved Electrical and Reliability Parameters by Konstantinos Efstathios Falidas, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky, Johannes Heitmann
Published 2022-11-01
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Impact of the Ferroelectric Stack Lamination in Si Doped Hafnium Oxide (HSO) and Hafnium Zirconium Oxide (HZO) Based FeFETs: Toward High-Density Multi-Level Cell and Synaptic Stora... by Tarek Ali, Kati Kühnel, Ricardo Olivo, David Lehninger, Franz Müller, Maximilian Lederer, Matthias Rudolph, Sebastian Oehler, Konstantin Mertens, Raik Hoffmann, Katrin Zimmermann, Philipp Schramm, Joachim Metzger, Robert Binder, Malte Czernohorsky, Thomas Kämpfe, Konrad Seidel, Johannes Müller, Jan Van Houdt, Lukas M. Eng
Published 2021-08-01
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