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    Reliability Study of 1T1C FeRAM Arrays With Hf<sub>0.5</sub>Zr<sub>0.5</sub>O&#x2082; Thickness Scaling

    Reliability Study of 1T1C FeRAM Arrays With Hf<sub>0.5</sub>Zr<sub>0.5</sub>O&#x2082; Thickness Scaling by Jun Okuno, Takafumi Kunihiro, Kenta Konishi, Yusuke Shuto, Fumitaka Sugaya, Monica Materano, Tarek Ali, Maximilian Lederer, Kati Kuehnel, Konrad Seidel, Thomas Mikolajick, Uwe Schroeder, Masanori Tsukamoto, Taku Umebayashi

    Published 2022-01-01
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