Hafnium Oxide Nanostructured Thin Films: Electrophoretic Deposition Process and DUV Photolithography Patterning by Vanessa Proust, Quentin Kirscher, Thi Kim Ngan Nguyen, Lisa Obringer, Kento Ishii, Ludivine Rault, Valérie Demange, David Berthebaud, Naoki Ohashi, Tetsuo Uchikoshi, Dominique Berling, Olivier Soppera, Fabien Grasset

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