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  1. 1
    Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology

    Graphite Pellicle: Physical Shield for Next‐Generation EUV Lithography Technology by Hyung Woo Choi, Ki‐Bong Nam, Dong‐Wook Shin

    Published 2023-04-01
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    Article
  2. 2
    Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer

    Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer by Jin-Ho Yeo, Ki-Bong Nam, Gil-Seon Kang, Qicheng Hu, Chang-Young Jeong, Young-Soo Park, Seok Jong Lee, Jaesun Jung, Seung Hyun Lee, Deok Hyun Cho, Mun-Ja Kim, Ji-Beom Yoo

    Published 2022-01-01
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    Article

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