Showing 1 - 2 results of 2 for search 'Kim, Ki-Bum', query time: 0.02s Refine Results
  1. 1
    Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography

    Understanding of hydrogen silsesquioxane electron resist for sub-5-nm-half-pitch lithography by Berggren, Karl K., Yang, Joel K. W., Cord, Bryan M., Duan, Huigao, Klingfus, Joseph, Nam, Sung-Wook, Kim, Ki-Bum, Rooks, Michael J.

    Published 2012
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  2. 2
    Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer

    Contrast enhancement behavior of hydrogen silsesquioxane in a salty developer by Nam, Sung-Wook, Rooks, Michael J., Yang, Joel K. W., Berggren, Karl K., Kim, Hyun-Mi, Lee, Min-Hyun, Kim, Ki-Bum, Sim, Jae Hwan, Yoon, Do Yeung

    Published 2012
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