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Heteroepitaxial growth of SiC films by carbonization of polyimide Langmuir-Blodgett films on Si by Goloudina S.I., Luchinin V.V., Pasyuta V.M., Panov M.F., Smirnov A.N., Kirilenko D.A., Semenova T.F., Sklizkova V.P., Gofman I.V., Svetlychnyi V.M., Kudryavtsev V.V.
Published 2017-01-01
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