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Automated remote microscope for inspection of integrated circuits by Kittipiyakul, Somsak
Published 2007
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2
Computer-Integrated Design and Manufacture of Integrated Circuits by Troxel, Donald E., McIlrath, Michael B., Chery, Yonald, Thompson, Carl V., Boning, Duane S., Lohman, Thomas J., Gower, Aaron E., Kao, James T., Lee, Brian, Kittipiyakul, Somsak, Perez, Manuel J., Moyne, William P., Wright, Chantal E., Peters, Christopher, Verminski, Matthew D., Chung, James E., Nemec, Joseph E., Gershwin, Stanley B.
Published 2010
Technical Report