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    Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO<sub>2</sub> ALD Properties for Improved Electrical and Reliability Parameters

    Three-Dimensional Metal-Insulator-Metal Decoupling Capacitors with Optimized ZrO<sub>2</sub> ALD Properties for Improved Electrical and Reliability Parameters by Konstantinos Efstathios Falidas, Kati Kühnel, Matthias Rudolph, Maximilian B. Everding, Malte Czernohorsky, Johannes Heitmann

    Published 2022-11-01
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