Showing 1 - 2 results of 2 for search 'Kovalgin, A. Yu.', query time: 0.02s Refine Results
  1. 1
    Plasmochemical deposition of silicon nitride films in the SiH4-Ar-N2 system studied by optical emission spectroscopy/

    Plasmochemical deposition of silicon nitride films in the SiH4-Ar-N2 system studied by optical emission spectroscopy/ by 495970 Aleksandrov, S. E., Kovalgin, A. Yu

  2. 2
    Physicochemical studies of systems and processes: UV spectroscopic study of the effect of ammonia additions on the pyrolysis of gallium chloride monoammoniate/

    Physicochemical studies of systems and processes: UV spectroscopic study of the effect of ammonia additions on the pyrolysis of gallium chloride monoammoniate/ by 495970 Aleksandrov, S. E., Kovalgin, A. Yu., Krasovitskii, D. M

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