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Investigation of Compact Hollow-Anode Discharge Source for Copper Thin Films by Sputtering Processes by In-Je Kang, Ji-Hun Kim, In-Sun Park, Kyu-Sun Chung
Published 2021-05-01
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Measurement of laser induced fluorescence for argon plasma flow with oxygen injection by In Je Kang, Jong Keun Yang, In Sun Park, Yong-Sup Choi, Kyu-Sun Chung
Published 2023-07-01
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