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    Crystallinity-Controlled Atomic Layer Deposition of Ti-Doped ZrO2 Thin Films

    Crystallinity-Controlled Atomic Layer Deposition of Ti-Doped ZrO2 Thin Films by Seokhwi Song, Eungju Kim, Kyunghoo Kim, Jangho Bae, Jinho Lee, Chang Hwa Jung, Hanjin Lim, Hyeongtag Jeon

    Published 2024-01-01
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