Showing 1 - 4 results of 4 for search 'L. C. Kimerling', query time: 0.02s
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Losses in polysilicon waveguides by Black, Marcie R. (Marcie Rochelle)
Published 2005Other Authors: “…L.C. Kimerling.…”
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The role of surface and bulk perfection in the processing and performance of crystalline silicon by M'saad, Hichem
Published 2005Other Authors: “…L.C. Kimerling.…”
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Particle generation in a chemical vapor deposition/plasma-enhanced chemical vapor deposition interlayer dielectric tool by Haberer, Elaine D. (Elaine Denise), 1975-
Published 2005Other Authors: “…L.C. Kimerling.…”
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