The Influence of Oxygen Pressure on ZnO:Al Thin Films Properties Grown Layer by Layer Growth Method at Magnetron Sputtering by A. I. Evtushenko, O. I. Bykov, L. O. Klochkov, O. S. Lytvyn, V. M. Tkach, O. M. Kutsay, S. P. Staryk, V. A. Baturyn, O. Y. Karpenko, M. G. Dusheyko, G. V. Lashkarev

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