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    Model Predictive Control of a Cvd Reactor for Production of Polysilicon Rods

    Model Predictive Control of a Cvd Reactor for Production of Polysilicon Rods by L. Viganò, M. Vallerio, F. Manenti, N.M.N. Lima, L. Zuñiga Liñan, G. Manenti

    Published 2010-08-01
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