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300-KHZ PULSE PLASMA-ETCHING OF GAAS USING A MIXTURE OF CICH3 AND H2 by Law, V, Tewordt, M, Clary, D, Jones, G
Published 1993Conference item -
2
INVESTIGATION OF MODULATED RADIO-FREQUENCY PLASMA-ETCHING OF GAAS USING LANGMUIR PROBES by Law, V, Braithwaite, N, Ingram, S, Clary, D, Jones, G
Published 1994Conference item