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    Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications

    Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications by Johann Zehetner, Alexander Kromka, Tibor Izsák, Gabriel Vanko, Lenka Gajdošová, Stephan Kasemann

    Published 2020-12-01
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