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Implementation of the CMOS MEMS Condenser Microphone with Corrugated Metal Diaphragm and Silicon Back-Plate by Ming-Chuen Yip, Weileun Fang, Jhyy-Cheng Liou, Li-Che Chen, Ming-Yi Wang, Shaoyi Wu, Li-Chi Tsao, Tsung-Min Hsieh, Chien-Hsing Lee, Chien-Hsin Huang
Published 2011-06-01
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