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    Resilience of ultra-thin oxynitride films to percolative wear-out and reliability implications for high-κ stacks at low voltage stress

    Resilience of ultra-thin oxynitride films to percolative wear-out and reliability implications for high-κ stacks at low voltage stress by Raghavan, Nagarajan, Padovani, Andrea, Li, Xiang, Bosman, Michel, Wu, Xing, Lip Lo, Vui, Larcher, Luca, Leong Pey, Kin

    Published 2013
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    Journal Article

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