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Low Temperature Area Selective Atomic Layer Deposition of Ruthenium Dioxide Thin Films Using Polymers as Inhibition Layers by Nithin Poonkottil, Hannes Rijckaert, Khannan Rajendran, Robin R. Petit, Lisa I. D. J. Martin, Dries Van Thourhout, Isabel Van Driessche, Christophe Detavernier, Jolien Dendooven
Published 2023-03-01
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