Showing 1 - 2 results of 2 for search 'Liwan Yue', query time: 0.02s Refine Results
  1. 1
    Multiple patterning bi-line/tri-line structure at limiting resolution for 7 nm by negative tone development of ArF immersion lithography

    Multiple patterning bi-line/tri-line structure at limiting resolution for 7 nm by negative tone development of ArF immersion lithography by Jinhao Zhu, Liwan Yue, Qiang Wu, Yanli Li

    Published 2024-12-01
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    Article
  2. 2
    Physical model-based ArF photoresist formulation development

    Physical model-based ArF photoresist formulation development by Liwan Yue, Zhibiao Mao, Qiang Wu, Yanli Li, Yanqiu Li

    Published 2024-02-01
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    Article

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