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Transverse ultrafast laser inscription in bulk silicon by M. Chambonneau, M. Blothe, Q. Li, V. Yu. Fedorov, T. Heuermann, M. Gebhardt, C. Gaida, S. Tertelmann, F. Sotier, J. Limpert, S. Tzortzakis, S. Nolte
Published 2021-10-01
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