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    Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM

    Three-dimensional structural comparison of tantalum glancing angle deposition thin films by FIB-SEM by T. Ott, D. Roldán, D. Roldán, C. Redenbach, K. Schladitz, M. Godehardt, S. Höhn

    Published 2019-10-01
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