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Synthesis of Copper Nitride Layers by the Pulsed Magnetron Sputtering Method Carried out under Various Operating Conditions by Magdalena Wilczopolska, Katarzyna Nowakowska-Langier, Sebastian Okrasa, Lukasz Skowronski, Roman Minikayev, Grzegorz W. Strzelecki, Rafal Chodun, Krzysztof Zdunek
Published 2021-05-01
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