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    Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers

    Optical and geometric parameter extraction across 300-mm photonic integrated circuit wafers by Jordan N. Butt, Nathan F. Tyndall, Marcel W. Pruessner, Kyle J. Walsh, Benjamin L. Miller, Nicholas M. Fahrenkopf, Alin O. Antohe, Todd H. Stievater

    Published 2024-01-01
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