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Single Femtosecond Laser-Pulse-Induced Superficial Amorphization and Re-Crystallization of Silicon by Camilo Florian, Daniel Fischer, Katharina Freiberg, Matthias Duwe, Mario Sahre, Stefan Schneider, Andreas Hertwig, Jörg Krüger, Markus Rettenmayr, Uwe Beck, Andreas Undisz, Jörn Bonse
Published 2021-03-01
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