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Atomic Layer Deposition of Boron‐Doped Al2O3 Dielectric Films by Xinzhi Li, Marko Vehkamäki, Mykhailo Chundak, Kenichiro Mizohata, Anton Vihervaara, Markku Leskelä, Matti Putkonen, Mikko Ritala
Published 2023-06-01
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