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    Polarity inversion of AlN film grown on nitrided a-plane sapphire substrate with pulsed DC reactive sputtering

    Polarity inversion of AlN film grown on nitrided a-plane sapphire substrate with pulsed DC reactive sputtering by Marsetio Noorprajuda, Makoto Ohtsuka, Hiroyuki Fukuyama

    Published 2018-04-01
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