Showing 1 - 2 results of 2 for search 'Masaki Takeguchi', query time: 0.02s
Refine Results
-
1
-
2
Improvement of structural quality of AlN layers grown on c-plane sapphire substrate by metal–organic vapor phase epitaxy using post-growth annealing with trimethylgallium by Masataka Imura, Hideki Inaba, Takaaki Mano, Nobuyuki Ishida, Fumihiko Uesugi, Yoko Kuroda, Yoshiko Nakayama, Masaki Takeguchi, Yasuo Koide
Published 2022-01-01
Article