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Masao Kawagoe
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Structural and Mechanical Properties of a-BCN Films Prepared by an Arc-Sputtering Hybrid Process
by
Yuki Hirata
,
Ryotaro Takeuchi
,
Hiroyuki Taniguchi
,
Masao Kawagoe
,
Yoshinao Iwamoto
,
Mikito Yoshizato
,
Hiroki Akasaka
,
Naoto Ohtake
Published 2021-02-01
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