Showing 1 - 4 results of 4 for search 'Matsumoto Satoru', query time: 0.02s
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Effect of pulse number on dopant activation in silicon during shallow p+/n junction formation by non-melt excimer laser annealing by Aid, Siti Rahmah, Hamzah, Azura, Ambran, Sumiaty, Matsumoto, Satoru, Johari, Zaharah, Fuse, Genshu
Published 2015Conference or Workshop Item -
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Comparison of theoretical and experimental analysis of P and Sn co-implantation in germanium by Mohamad Rashid, Nur Nadhirah, Abdul Aziz, Umar, Aid, Siti Rahmah, Centeno, Anthony, Matsumoto, Satoru, Xie, Fang, Suwa, Akira, Ikenoue, Hiroshi
Published 2017Conference or Workshop Item -
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Optimization of ion implantation using trim software for the formation of shallow n+/p junction in germanium substrate by Abdul Aziz, Umar, Nur Farhana Arissa, Nur Farhana Arissa, Aid, Siti Rahmah, Yahaya, Hafizal, Centeno, Anthony, Matsumoto, Satoru, Uedono, Akira, Mcphail, David
Published 2015
Conference or Workshop Item