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Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor by Abdullah S. Algamili, Mohd Haris Khir, Abdelaziz Y. Ahmed, Almur A. Rabih, Saeed S. Ba-Hashwan, Sami S. Alabsi, Osamah L. Al-Mahdi, Usman B. Isyaku, Mawahib G. Ahmed, Muhammad Junaid
Published 2022-03-01
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