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In‐Plane AlN‐Based Actuator: Toward a New Generation of Piezoelectric MEMS by Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto‐Kröckel
Published 2023-12-01
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In‐Plane AlN‐based Actuator: Toward a New Generation of Piezoelectric MEMS by Kristina Bespalova, Tarmo Nieminen, Artem Gabrelian, Glenn Ross, Mervi Paulasto‐Kröckel
Published 2023-08-01
Article