Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements by Min Xu, Zhi Li, Michael Fahrbach, Erwin Peiner, Uwe Brand

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Strategy toward Miniaturized, Self-out-Readable Resonant Cantilever and Integrated Electrostatic Microchannel Separator for Highly Sensitive Airborne Nanoparticle Detection by Maik Bertke, Jiushuai Xu, Michael Fahrbach, Andi Setiono, Hutomo Suryo Wasisto, Erwin Peiner

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Customized piezoresistive microprobes for combined imaging of topography and mechanical properties by Michael Fahrbach, Sebastian Friedrich, Heinrich Behle, Min Xu, Brunero Cappella, Uwe Brand, Erwin Peiner

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Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing by Jiushuai Xu, Maik Bertke, Xuejing Li, Andi Setiono, Michael Fahrbach, Angelika Schmidt, Erwin Peiner

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In-Line Measurement of the Surface Texture of Rolls Using Long Slender Piezoresistive Microprobes by Linus Teir, Tuomas Lindstedt, Thomas Widmaier, Björn Hemming, Uwe Brand, Michael Fahrbach, Erwin Peiner, Antti Lassila

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Real-Time Frequency Tracking of an Electro-Thermal Piezoresistive Cantilever Resonator with ZnO Nanorods for Chemical Sensing by Andi Setiono, Jiushuai Xu, Michael Fahrbach, Maik Bertke, Wilson Ombati Nyang’au, Hutomo Suryo Wasisto, Erwin Peiner

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Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure by Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto, Erwin Peiner

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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography by Michael Fahrbach, Min Xu, Wilson Ombati Nyang’au, Oleg Domanov, Christian H. Schwalb, Zhi Li, Christian Kuhlmann, Uwe Brand, Erwin Peiner

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In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection by Andi Setiono, Maik Bertke, Wilson Ombati Nyang’au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Hutomo Suryo Wasisto, Erwin Peiner

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