Borosilicate Glass MEMS Lorentz Force Magnetometer by Matthias Kahr, Matthias Domke, Harald Steiner, Wilfried Hortschitz, Michael Stifter

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Equivalent Circuit Model of an Optomechanical MEMS Electric Field Strength Sensor by Andreas Kainz, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Franz Keplinger

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Novel 3D-Printed MEMS Magnetometer with Optical Detection by Matthias Kahr, Wilfried Hortschitz, Harald Steiner, Michael Stifter, Andreas Kainz, Franz Keplinger

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3D-Printed MEMS Magnetometer Featuring Compliant Mechanism by Matthias Kahr, Harald Steiner, Wilfried Hortschitz, Michael Stifter, Andreas Kainz, Franz Keplinger

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Cross-Sensitivity of an Optomechanical MEMS Transducer by Harald Steiner, Andreas Kainz, Michael Stifter, Matthias Kahr, Gabor Kovacs, Franz Keplinger, Wilfried Hortschitz

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Characterization of a Micro-Opto-Mechanical Transducer for the Electric Field Strength by Wilfried Hortschitz, Andreas Kainz, Harald Steiner, Gabor Kovacs, Michael Stifter, Matthias Kahr, Johannes Schalko, Franz Keplinger

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Responsitivity Measurement of a Lorentz Force Transducer for Homogeneous and Inhomogeneous Magnetic Fields by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovacs, Andreas Kainz, Johannes Schalko, Franz Keplinger

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Dual Resonator MEMS Magnetic Field Gradiometer by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovács, Andreas Kainz, Johannes Schalko, Franz Keplinger

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MOEMS Based Single Chip Lorentz Force Magnetic Gradiometer by Matthias Kahr, Michael Stifter, Harald Steiner, Wilfried Hortschitz, Gabor Kovacs, Andreas Kainz, Johannes Schalko, Franz Keplinger

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