Showing 1 - 3 results of 3 for search 'Michihiro SATO', query time: 0.02s Refine Results
  1. 1
    Crystal plasticity analysis of the suppression of dislocation accumulation during the production process of semiconductor devices

    Crystal plasticity analysis of the suppression of dislocation accumulation during the production process of semiconductor devices by Michihiro SATO, Tetsuya OHASHI, Yoshiki KAWANO

    Published 2020-04-01
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    Article
  2. 2
    Simulation of dislocation accumulation in ULSI cells during the formation of thermal oxide film

    Simulation of dislocation accumulation in ULSI cells during the formation of thermal oxide film by Michihiro SATO, Tetsuya OHASHI, Toru OIKAWA, Takuya MARUIZUMI

    Published 2015-12-01
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    Article
  3. 3
    Development of a EBSD-FEM data conversion interface and the image-based crystal plasticity analysis

    Development of a EBSD-FEM data conversion interface and the image-based crystal plasticity analysis by Yoshiki KAWANO, Tetsuya OHASHI, Tsuyoshi MAYAMA, Masaki TANAKA, Morihiro SAKAMOTO, Yelm OKUYAMA, Michihiro SATO

    Published 2018-03-01
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