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Dynamics of Plasma‐Assisted Epitaxial Silicon Growth Driven by a Hydrogen‐Incorporated Nanostructure for Novel Applications by Joon-Ho Oh, Tae Kyung Lee, Ryoon Young Kim, Jeong-Ho An, Sung-In Mo, Ji-Eun Hong, Sun-Wook Kim, Min Jong Keum, Hee-eun Song, Ka-Hyun Kim
Published 2024-02-01
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