Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification by Berke Erbas, Ana Conde-Rubio, Xia Liu, Joffrey Pernollet, Zhenyu Wang, Arnaud Bertsch, Marcos Penedo, Georg Fantner, Mitali Banerjee, Andras Kis, Giovanni Boero, Juergen Brugger

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