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Submicron Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Ku, Yao-Ching, Moel, Alberto M., Schattenburg, Mark L., The, Siang-Chun, Yen, Anthony T., Gutierrez, JoAnne M., Lu, Kenneth P., Ng, Lee-Peng, Salyani, Shahir R., Su, Lisa T-F., Tsai, Flora S., Wey, Lead, Antoniadis, Dimitri A., Carlin, Gregory A., Fang, Hao, Hu, Hang, Field, Stuart B., Kastner, Marc A., Park, Samuel L., Scott-Thomas, John H. F., Bagwell, Phillip F., Orlando, Terry P., del Alamo, Jesus A., Ismail, Khalid, Yee, Kenneth, Evans, Keith, Liu, C. T., Shayegan, M., Smith, T. P., Tsui, Daniel, Zhao, Yang, Canizares, Claude R., Floro, Jerrold A., Thompson, Carl V.
Published 2010
Technical Report -
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Submicron and Nanometer Structures Technology and Research by Smith, Henry I., Aucoin, Richard J., Carter, James M., Chu, William, Fleming, Robert C., Jr., Ghanbari, Reza A., Gupta, Nitin, Hector, Scott D., Li, Huiying, Moel, Alberto M., Schattenburg, Mark L., Wong, Vincent V., Ferrera, Juan, Lim, Michael H. Y., Mondol, Mark K., Frankel, Robert, Shah, Satyen N., Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Eugster, Cristopher C., Kumar, Arvind, Orlando, Terry P., Rooks, Michael J., Burkhardt, Martin, del Alamo, Jesús A., Chou, Michael T., Shayegan, M., Sang-hun, Song, Tsui, Daniel, Yee, Kenneth, Zhao, Yang, Choi, Woo-Young, Fonstad, Clifton G., Jr., Damask, Jay N., Haus, Hermann A., Kolodziejski, Leslie A., Chu, Jack, Graybeal, John M., Meyerson, Bernard S., Rittenhouse, George E., Lew, Julie C., Canizares, Claude R., Ismail, Khalid, Karam, Nasser
Published 2010
Technical Report -
3
Submicron and Nanometer Structures Technology and Research by Smith, Henry I., Burkhardt, Martin, Carter, James M., Chu, William, Early, Kathleen R., Ghanbari, Reza A., Hector, Scott D., Ku, Yao-Ching, Moel, Alberto M., Rittenhouse, George E., Schattenburg, Mark L., Wong, Vincent V., Yen, Anthony T., Ferrera, Juan, Mondol, Mark K., Ng, Lee-Peng, Tsai, Flora S., Yunus, Sabah, Antoniadis, Dimitri A., Chung, James E., Fang, Hao, Hu, Hang, Su, Lisa T-F., Kastner, Marc A., Kumar, Arvind, Orlando, Terry P., del Alamo, Jesús A., Eugster, Cristopher C., Moon, Euclid E., Shayegan, M., Tsui, Daniel, Zhao, Yang, Chou, Michael T., Choi, Woo-Young, Damask, Jay N., Fonstad, Clifton G., Jr., Haus, Hermann A., Kolodziejski, Leslie A., Wong, Vincent V., Graybeal, John M., Meyerson, Bernard S., Olster, Daniel B., Canizares, Claude R., Fleming, Robert C., Jr., Nenonen, Seppo, Bristowe, Paul D., Carel, Roland, Floro, Jerrold A., Thompson, Carl V., Yee, Kenneth, Ismail, Khalid, Karam, Nasser
Published 2010
Technical Report