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SU-8 Cantilevers for Bio/chemical Sensing; Fabrication, Characterisation and Development of Novel Read-out Methods by Anja Boisen, Mogens Havsteen-Jakobsen, Gabriela Blagoi, Daniel Haefliger, Søren Dohn, Alicia Johansson, Michael Lillemose, Stephan Keller, Maria Nordström
Published 2008-03-01
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