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    Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor

    Photolithography of SU-8 microtowers for a 100-turn, 3-D toroidal microinductor by Jungkwun J. K. Kim, Hassan Al Thuwaini, Mohammad Almuslem

    Published 2018-12-01
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