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    High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography

    High-Throughput Fabrication of Resonant Metamaterials with Ultrasmall Coaxial Apertures via Atomic Layer Lithography by Yoo, Daehan, Martin-Moreno, Luis, Mohr, Daniel A., Carretero-Palacios, Sol, Shaver, Jonah, Ebbesen, Thomas W., Oh, Sang-Hyun, Nguyen, Ngoc Cuong, Peraire, Jaime

    Published 2016
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