Design and Modeling of Polysilicon Electrothermal Actuators for a MEMS Mirror with Low Power Consumption by Miguel Lara-Castro, Adrian Herrera-Amaya, Marco A. Escarola-Rosas, Moisés Vázquez-Toledo, Francisco López-Huerta, Luz A. Aguilera-Cortés, Agustín L. Herrera-May

Get full text