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Moon, Euclid Eberle
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Moon, Euclid Eberle
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Moon, Euclid Eberle
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1
Optical nanolithography with λ/15 resolution using bowtie aperture array
by
Wen, Xiaolei
,
Srisungsitthisunti, Pornsak
,
Xu, Xianfan
,
Traverso, Luis M.
,
Moon, Euclid Eberle
Published 2016
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2
Nanometer-level alignment using interferometric-spatial-phase-imaging (ISPI) during silicon nanowire growth
by
Srisungsitthisunti, Pornsak
,
Tansarawiput, Chookiat
,
Zhang, Huaichen
,
Qi, Minghao
,
Xu, Xianfan
,
Moon, Euclid Eberle
Published 2011
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Article
3
High throughput optical lithography by scanning a massive array of bowtie aperture antennas at near-field
by
Wen, X.
,
Datta, A.
,
Traverso, L. M.
,
Pan, L.
,
Xu, X.
,
Moon, Euclid Eberle
Published 2016
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