Development of nanometer-thick graphite film extreme ultraviolet pellicle with hydrogen-resistant TiN capping layer by Jin-Ho Yeo, Ki-Bong Nam, Gil-Seon Kang, Qicheng Hu, Chang-Young Jeong, Young-Soo Park, Seok Jong Lee, Jaesun Jung, Seung Hyun Lee, Deok Hyun Cho, Mun-Ja Kim, Ji-Beom Yoo

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