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THE STRUCTURE OF THIN SILICON LAYERS WITH CONCENTRATION OF IMPLANTED CARBON NC/NSI=0.12 by N.B. Beisenkhanov
Published 2008-12-01
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The formation of SiC films by magnetron sputtering by K. Kh. Nussupov, N. B. Beisenkhanov, B. Zh. Seitov, D. I. Bakranova, S. Keyinbay
Published 2019-01-01
Article