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Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li<sub>3</sub>PO<sub>4</sub> Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge by Nikolay Gavrilov, Alexander Kamenetskikh, Petr Tretnikov, Alexey Nikonov, Leonid Sinelnikov, Denis Butakov, Viktor Nikolkin, Andrey Chukin
Published 2021-12-01
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Exciton Luminescence and Optical Properties of Nanocrystalline Cubic Y<sub>2</sub>O<sub>3</sub> Films Prepared by Reactive Magnetron Sputtering by Anatoly Zatsepin, Yulia Kuznetsova, Dmitry Zatsepin, Chi-Ho Wong, Wing-Cheung Law, Chak-Yin Tang, Nikolay Gavrilov
Published 2022-08-01
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