Quantum Cascade Laser Absorption Spectroscopy as a Plasma Diagnostic Tool: An Overview by Jürgen Röpcke, Norbert Lang, Marko Hübner, Frank Hempel, Stefan Welzel, Paul B. Davies

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Applying Quantum Cascade Laser Spectroscopy in Plasma Diagnostics by Jürgen Röpcke, Paul B. Davies, Stephan Hamann, Mario Hannemann, Norbert Lang, Jean-Pierre H. van Helden

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RES-Q-Trace: A Mobile CEAS-Based Demonstrator for Multi-Component Trace Gas Detection in the MIR by Norbert Lang, Uwe Macherius, Henrik Zimmermann, Sven Glitsch, Mathias Wiese, Jürgen Röpcke, Jean-Pierre H. van Helden

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On the relationship between SiF4 plasma species and sample properties in ultra low-k etching processes by Micha Haase, Marcel Melzer, Norbert Lang, Ramona Ecke, Sven Zimmermann, Jean-Pierre H. van Helden, Stefan E. Schulz

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