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    INVESTIGATION OF INFLUENCE OF SCANNING STEP ON IR-TRANMISSION SPECTRA OF NITRIDE ALUMINUM FILMS

    INVESTIGATION OF INFLUENCE OF SCANNING STEP ON IR-TRANMISSION SPECTRA OF NITRIDE ALUMINUM FILMS by O.S. Zurkhaeva, D.S. Zurkhaev, L.P. Aref`eva

    Published 2015-11-01
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