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    Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere

    Effect of substrate temperature on the properties of diamond-like carbon deposited by PECVD in methane atmosphere by Sarmid, Suriany, Oeraman, Karim, Ismail, Bakar, Sakrani, Samsudi

    Published 2006
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    Conference or Workshop Item

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